Browsing by Author "AKYOL FATİH, DEMİR İLKAY"
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Close oxygen coupled low-pressure chemical vapor deposition growth of high quality β-Ga2O3 on sapphire
AKYOL FATİH, DEMİR İLKAY (2022)We report on the close oxygen coupled low-pressure chemical vapor deposition (COC-LPCVD) hetero-epitaxial growth of atomically smooth (− 201) oriented β− Ga2O3 on c-plane sapphire. Utilizing a dedicated line within the ...